MKS GE50A558203RSV010 Mass Flow Controller
Buy the MKS GE50A558203RSV010 Mass Flow Controller. This precision MFC features a 2000 SCCM flow range, RS485 digital communication, and is specially configured for 1% B2H6/N2 (Diborane/Nitrogen) gas mixtures. Ideal for reliable and accurate gas delivery in semiconductor processing equipment.
MKS GE50A558203RSV010 Mass Flow Controller
The MKS Instruments GE50A558203RSV010 is a high-performance Mass Flow Controller (MFC) engineered for precise gas flow measurement and control in semiconductor manufacturing and advanced industrial applications. This specific unit is calibrated for a flow range of 2000 SCCM and configured for a 1% B2H6/N2 (1% Diborane in Nitrogen) gas mixture. Operating on a +11 to 25 VDC power input, it features a robust RS485 digital communication interface for seamless integration into modern control systems. The device is equipped with top-mounted LED indicators for Zero, Error, and Comm status, enabling quick and easy field diagnostics.
Technical Specifications:
- Manufacturer: MKS Instruments
- Model Number: GE50A558203RSV010
- Full Scale Range: 2000 SCCM
- Gas Configuration: 1% B2H6/N2 (1% Diborane in Nitrogen)
- Power Requirements: +11 to 25 VDC
- Communication Interface: RS485
- RS485 Pinout: Pin 5 B/B’ (RS485+), Pin 7 RS485 Common, Pin 9 A/A’ (RS485-)
- Visual Indicators: Zero, Error, and Comm LEDs
- Compliance: CE Marked
| Brand | MKS |
|---|---|
| Model | GE50A558203RSV010 |
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