Ueshima Brooks 5810 Thermal Mass Flow Sensor / Controller
Ueshima Brooks 5810 Mass Flow Controller, calibrated for 2 SLM of Hydrogen (H2) gas. Ideal for precise gas flow measurement and control in industrial or laboratory settings.
Ueshima Brooks 5810 Thermal Mass Flow Sensor / Controller
The Ueshima Brooks 5810 is a high-performance Thermal Mass Flow Controller (MFC) engineered for precise measurement and control of gas flow in demanding applications. This specific unit is factory-calibrated for Hydrogen (H2) gas with a full-scale flow range of 2 SLM (Standard Liters per Minute). The assembly integrates a reliable thermal mass flow sensor and a solenoid control valve onto a single metal bracket, complete with tube fittings for easy installation. It is an ideal solution for systems in research, semiconductor manufacturing, and industrial processes that require accurate and repeatable gas delivery. To ensure longevity and accuracy, it is crucial to use this device with clean, particle-free gas lines.
Technical Specifications:
- Brand: Ueshima Brooks
- Model: 5810
- Gas Media: Hydrogen (H2)
- Flow Range: 2 SLM (Standard Liters per Minute)
- Serial Number: 7909-5140
| Brand | Ueshima Brooks |
|---|---|
| Model | 5810 |
GENERAL DELIVERY INFORMATION
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